针对外界称台积电因保守不愿投资下一代光刻设备的传言，台积电董事长魏哲家近日在股东大会上亲自辟谣，表示有买High-NA EUV光刻机，且正努力研发，但基于成本考量，现阶段暂不投入量产。这台ASML研发的最新High-NA EUV光刻机，每台单价高达3.8亿至4亿美元，是当前主流EUV设备的两倍多。魏哲家坦言，设备太贵是暂不量产的主因。 阅读全文
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